Case Study: Low Outgassing Grease for Flat Panel Display
Application: Cross Arm Bearings
Location: Japan & South Korea
Challenge
A semiconductor equipment manufacturer who specializes in automation and semiconductor production equipment approached us to find the right lubricant for their cross-arm robot bearings. These mechanisms, which manufacture flat panel displays, operate at high temperatures of up to 200°C under high vacuum. The manufacturer’s customer was having issues with outgassing contamination caused by a heritage lubricant. The customer needed a soft, low outgassing lubricant that would reduce contamination and improve wear performance.
- Can we provide a low outgassing, high-temperature, high-vacuum lubricant?
- Can we provide a soft grease for easy dispensing?
Solution
NYETORR® 6300S
A PTFE thickened, heavy viscosity, perfluoropolyether grease.
- Wide operating temperature of -75 to 250°C
- Extremely low vapor pressure and outgassing properties
- NLGI Grade 1
- Reduces friction to extend bearing life.
| Product | Chemistry | Temp Range (°C) |
Penetration Unworked Worked 60X |
Starting Torque (25°C) |
Running Torque (60 mins 25°C) |
|---|---|---|---|---|---|
| NYETORR 6300S | PFPE/PTFE | -75 to 250 | 315 321 |
147.5 g/cm | 74.7 g-cm |
Results
We provided the customer with a sample of NYETORR® 6300 which met their outgassing requirements but proved too stiff for their application. Our R&D team then formulated NYETORR® 6300S, a softer version of NYETORR® 6300 which was then tested and proven to have low outgassing properties and high penetration values for easy dispensing. NYETORR® 6300S reduced the customer’s risk of contamination and they remain satisfied with its performance.
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