Case Study: Reducing Frictional Torque for Linear Guide Rails in Vacuum Environments
Torque is defined as the twisting force that can cause rotation. Frictional torque is the torque generated by the frictional force that occurs when two surfaces in contact slide against each other.
For example, when you ride your bicycle and apply the brake to the front wheel, the bike tips forward because of the frictional torque created between the wheel and the brake. If too much frictional torque is applied, you may stop too quickly and fall. On the other hand, if not enough frictional torque is applied, the bike will not stop soon enough which could pose safety concerns.
Frictional torque can be an asset, as in the proper amount for braking, but can also be a hindrance in a variety of engineering applications. Therefore, attempts to minimize frictional torque is a constant challenge for mechanical engineers, especially in vacuum and cleanroom environments where lubricants must be carefully selected to reduce the risk of outgassing and contamination which can accelerate vibration and wear.
Frictional Torque: A Real-Life Example
A leading manufacturer of semiconductor processing equipment had been diligently searching for ways to reduce frictional torque and wear caused by sliding forces on their linear guide rails. The most pressing problem was that the environmental conditions in the system were harsh: very high vacuum and operating temperatures ranging from 25 to 150°C. To prevent system contamination, any lubricant solution would have to have very low outgassing characteristics, and low particle generation in dynamic, constantly changing conditions. While searching worldwide for a solution, the manufacturer came to Nye Lubricants for our help.
Meeting the Challenge
To solve the customer’s problem, Nye suggested using NyeTorr® 5200, the proven solution for semiconductor processing equipment. This PTFE thickened, medium viscosity cyclopentane grease has excellent vacuum stability, low outgassing characteristics, and is designed to reduce frictional torque on sliding surfaces. In addition, this grease has a wide temperature performance range from -45 to 150°C for withstanding harsh environmental conditions.
| Product | Chemistry | Temp Range (°C) |
Dynamic Particle Generation |
Knudsen Vapor Pressure (25°C) |
|---|---|---|---|---|
| NYETORR 5200 | MAC/PTFE | -45 to 150 | ISO Class 3 | 4x10-12 torr |
The Proof is in the Performance
After successfully passing Nye’s Applications Development and Validation Testing, and the customer's independent validation testing, NyeTorr® 5200 was selected to lubricate the linear guide rails in this critical semiconductor processing equipment application. The results were deemed extraordinary, as the frictional torque was reduced in the sliding surfaces by almost 33%, and the customer (and their client) are very pleased with the results.
In addition to slides and rails, Nye provides lubrication solutions for other semiconductor and in-vacuum equipment components including bearings, ball and lead screws, gaskets, O-rings, seals, and connectors. Are you currently working on a hard-to-solve problem? Talk to Nye and let us show you how we can help.
Robert Grizzetti - Senior Product Support Engineer
Robert has been with Nye for 10 years, first starting as an International Regional Engineering Manager (IREM) providing lubrication solutions to our Japanese customers. Now as a Senior Product Support Engineer, Robert coordinates the exchange of technical and commercial product information between headquarters and our sales team to ensure products meet customer specifications. As an IREM and member of Nye’s Semiconductor team, Robert has extensive technical knowledge in lubricants for semiconductor and in-vacuum applications.
John Evans – Director, Sales Operations & Semiconductor/In-Vacuum Industry Manager
John has been with Nye for 5 years, starting as Director, North American Business Development, and now Director of Sales Operations and Support, and Semiconductor and In-Vacuum Industry Manager, whose team provides lubrication solutions for Semicon OEMs, Robotics and Sub-Systems manufacturers, and a wide variety of In-Vacuum Component-related applications worldwide.
Click here to connect with John on LinkedIn.
