Case Study: Ultra-Low Outgassing for Wafer Robot Bearings
Background
In-vacuum and cleanroom applications require lubricants with low-outgassing properties in order to reduce the risk of contamination and potential failures. Nye was approached by a company that manufactures robots for the semiconductor industry who needed a high temperature, ultra-low outgassing grease for robots operating on OLED Display (organic light-emitting diode) manufacturing lines. The environmental conditions were high vacuum and typical operating temperatures were in the range of 160°C to 240°C. The company was using a PFPE grease in the application but wanted to improve the outgassing properties.
Challenge
- Can we formulate a grease that provides outgassing, friction, and wear properties that are significantly better than those of NYETORR® 5300 and 6300 greases, both industry standards in the high vacuum world?
Solution
Custom Formulation
A PTFE thickened, heavy viscosity, NLGI Grade 1, perfluoropolyether grease.
- Highly stripped version of NYETORR® 6300S
- Lowest outgassing grease ever produced by Nye
- Operates -75 to 250°C, a wider temperature range than NYETORR® 6300
| Product | Chemistry | Temp Range (°C) | Outgassing/ TML/CVCM | Knudsen Vapor Pressure (Torr) |
|---|---|---|---|---|
| Custom Formulation | PFPE / PTFE | -75 to 250 | 0.012%/0.004% | 8.55 E-08 |
Results
Nye formulated a custom product for this company to meet their requirements for all specs, including outgassing results that were four times lower than NYETORR® 6300 results. Testing was also completed to ensure friction and wear characteristics of the grease were not affected by the special processing necessary for low outgassing results. This custom formulation is now being used in the bearing as an ultra-low outgassing grease with low torque and good friction and wear properties.
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