NyeClean® & NyeTorr® for Semiconductor

NyeClean® & NyeTorr® are two growing product lines of Nye Lubricants, Inc.

NyeClean®

The NyeClean® line has been developed with its focus on a wide range of general purpose applications in lower vacuum cleanroom environments. In this product line, you will find the broadest range of lubricants developed for motion control applications like bearings, linear guides, and ball screws. Some of the benefits of the NyeClean® product line include low particle generation, wear prevention, and low torque.

NyeTorr®

NyeTorr® is a unique line of lubricants designed for the rigorous demands of the Semiconductor production environment. These products have been developed with several key parameters in mind: low outgassing, high temperature stability, aggressive chemical resistance, wear protection, and cleanliness. The raw materials used in NyeTorr® formulations are tightly controlled on a molecular level to limit the vapor pressure, outgassing, and contamination.

NyeTorr® 6200 and NyeTorr® 6300 improve the performance and extend the operating life of high-speed bearings, linear guides for motion control, vacuum pumps, and other components used in Semicon manufacturing equipment. These products were designed for processes such as deposition, ion implantation, etching, photolithography, and wafer measurement and inspection.

Validated and Ultrafiltered

Nye tests and certifies the vacuum stability (E-595) of each batch of NyeTorr® products. While other manufacturers of vacuum lubricants list only “typical properties”, Nye Lubricants provides actual certifications of vapor pressure for each batch of lubricant. Additionally, all NyeTorr® cleanroom lubricants are subjected to a proprietary ultrafiltration process which removes microscopic particulates and homogenizes agglomerated thickeners. All are packaged in ultraclean containers in a Class 100 (ISO Class 5) mini-environment.