Case Study: Reducing Frictional Torque for Linear Guide Rails

Application: Semiconductor Processing Equipment
Location: Linear Guide Rail

Challenge

A company that manufactures semiconductor processing equipment approached us about lubricating the rail in a linear guide system. The company wanted to reduce wear in the sliding application. The environmental conditions were high vacuum, and typical operating temperatures ranged between 25°C - 150°C. To prevent contamination and premature failure of the system, the company required a lubricant with low outgassing, excellent friction and wear properties, and low particle generation.

  • Can the lubricant reduce wear under sliding conditions?

Solution

NYETORR® 5200

A soft, PTFE thickened, medium viscosity cyclopentane grease.

  • Extremely low particle generation
  • Low outgassing and vapor pressure
  • Reduces frictional torque on sliding surfaces
  • Excellent vacuum stability
ProductChemistryTemp
Range (°C)
Total
Mass Loss
Collected Volatile
Condensable Materials
Knudsen
Vapor Pressure
(25°C)
NYETORR® 5200 PTFE / Cyclopentane -45 to 150 0.068 wt% 0.007 wt% 1.1 x 10-8 Torr "}]}

Results

Our Applications Development and Validation Testing Lab ran Vacuum Stability, Dynamic Particle Generation, Knudsen Vapor Pressure, and Coefficient of Friction & Wear testing on several NYETORR® products. The customer decided to move forward with NYETORR® 5200 as the lubricant for this linear guide after it proved to reduce frictional torque on sliding surfaces by approximately 33%.

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